Synonym(s): (Me2N)3SiH; N,N,N',N',N'',N''-Hexamethylsilanetriamine; TDMAS; Tris(dimethylamido)silane
Empirical Formula: C6H19N3Si
Linear Formula: ((CH3)2N)3SiH
Formula Weight: 161.32
MDL Number: MFCD00048006
Purity: 99.999%
Boiling Point: 142 °C(lit.)
Melting Point: −90 °C(lit.)
Density: 0.838 g/mL at 25 °C(lit.)
Signal Word: Danger
Hazard statements: H225-H261-H302-H311-H314-H330
Precautionary statements: P210-P231 + P232-P260-P280-P284-P422
Risk Statements (Europe): 11-15-20-29-34-52/53
Safety Statements (Europe): 16-26-36/37/39-43-45
Hazard Codes (Europe): F,C