Synonyms: Bis(trimethylsilyl)amine, HMDS
Hill Formula: C6H19NSi2
CAS Number: 999-97-3
UN Number: UN3286
Solubility: (20 °C) decomposes
Melting Point: -82 °C
Molar Mass: 161.39 g/mol
Boiling Point: 126 °C (1013 mbar)
Vapor Pressure: 20 hPa (20 °C)
Flash Point: 15 °C
Explosion Limit: 0.8 - 25.9 %(V)
Density: 0.78 g/cm3 (20 °C)
Ignition Point: 325 °C