Phosphoric Acid SEMI Grade specification is designed to meet the standards set forth by the industry association SEMI for phosphoric acid used in the semiconductor and electronics manufacturing industry.
ITEM SPECIFICATIONS
Assay (Phosphoric Acid) : 85.0 - 87.0 %
Chloride (Cl) : 1 ppm max.
Nitrate (NO3) : 5 ppm max.
Antimony (Sb) : 10 ppm max.
Arsenic (As) : 0.05 ppm max.
Aluminum (Al) : 0.5 ppm max.
Calcium (Ca) : 1.5 ppm max.
Chromium (Cr) : 0.2 ppm max.
Cobalt (Co) : 0.05 ppm max.
Copper (Cu) : 0.05 ppm max.
Gold (Au) : 0.3 ppm max.
Iron (Fe) : 2.0 ppm max.
Lead (Pb) : 0.3 ppm max.
Lithium (Li) : 0.1 ppm max.
Magnesium (Mg) : 0.2 ppm max.
Manganese (Mn) : 0.1 ppm max.
Nickel (Ni) : 0.2 ppm max.
Potassium (K) : 1.5 ppm max.
Sodium (Na) : 2.5 ppm max.
Strontium (Sr) : 0.1 ppm max.
Titanium (Ti) : 0.3 ppm max.
Zinc (Zn) : 2.0 ppm max.